Summary of Research Status and Application of MEMS Accelerometers
Summary of Research Status and Application of MEMS Accelerometers is a scholarly work, published in 2018 in ''Journal of Computer and Communications''. The main subjects of the publication include accelerometer, computer science, electronic engineering, micro-electromechanical systems, piezoelectric accelerometer, engineering, Piezoresistive effect, capacitive sensing, chemical-mechanical planarization, and electrical engineering. The rapid development of MEMS technology has made MEMS accelerometers mature and the application range has been expanded.