Optimization of MEMS capacitive accelerometer
Optimization of MEMS capacitive accelerometer is a scholarly work, published in 2013 in ''Microsystem Technologies''. The main subjects of the publication include MATLAB, condensed matter physics, accelerometer, sensitivity, computer science, electronic engineering, acoustics, Optomechanics, capacitive sensing, fiber-optic sensor, software, and micro-electromechanical systems. The general concept, main design considerations and performance of the resulted accelerometer was optimized and elaborated in order to obtain a good improvement.