Modeling and optimization of atomic layer deposition processes on vertically aligned carbon nanotubes
Modeling and optimization of atomic layer deposition processes on vertically aligned carbon nanotubes is a scholarly work by Nuri Yazdani and Hyung Gyu Park, published in 2014 in ''Beilstein Journal of Nanotechnology''. The main subjects of the publication include nanotechnology, nanopore, layer, carbon nanotube, nanostructure, conformal coating, nanowire, materials science, porosity, ceramic, graphene, coating, deposition, aspect ratio, and atomic layer deposition. The authors validate the model predictions with experimental data from ALD coatings of VACNT arrays.