Development and control of a compact 3-DOF micromanipulator for high-precise positioning
Development and control of a compact 3-DOF micromanipulator for high-precise positioning is a scholarly work, published in 2014. The main subjects of the publication include atomic force microscopy, engineering, computer science, -, Micromanipulator, biological mechanism, control engineering, stiffness, actuator, and micro-electromechanical systems. The paper presents a compact 3-DOF micromanipulator, which is a variant of the rigid 3-P(4S) parallel mechanism.