Controlled synthesis of self-assembled 3D nanostructures using metastable atomic layer deposition
Controlled synthesis of self-assembled 3D nanostructures using metastable atomic layer deposition is a scholarly work, published in 2018 in ''Materials Today Chemistry''. The main subjects of the publication include layer, deposition, silicon, nanotechnology, silane, coating, atomic layer deposition, conformal coating, chemical engineering, aquarium substrate, materials science, nanostructure, and metastability. The article presents a new method to generate 3D silver-silica nanostructures using plasma-enhanced atomic layer deposition of silica with tri(dimethylamino)silane (TDMAS) and oxygen plasma as precursors.