Multiple internal resonances in MEMS arch resonators


Multiple internal resonances in MEMS arch resonators is a scholarly work, published in 2018 in ''Physics Letters A''. The main subjects of the publication include resonator, acoustics, beam, physics, excitation, electronic amplifier, Optomechanics, micro-electromechanical systems, natural frequency, resonance, normal mode, arch, oscillation, and vibration. The authors show various frequency-response curves of the total response around the excitation frequency and highlight the contribution of each mode before, during, and after the internal resonances.