Multilayer roughness evaluated by X-ray reflectivity


Multilayer roughness evaluated by X-ray reflectivity is a scholarly work, published in 1988 in ''Journal of Applied Crystallography''. The main subjects of the publication include optics, reflectance, diffraction, Monte Carlo method, surface finish, Gaussian, surface roughness, probability distribution, Gaussian surface, powder diffraction, root mean square, X-ray reflectivity, displacement, aquarium substrate, computational physics, materials science, and distribution. The study shows that the most important defect reducing the integrated reflectivities of the multilayer structures studied was correlated roughness (root mean square value about 7 Å).

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