Innovations in Micro/Nano Patterning Using Tool-Based Methods
Innovations in Micro/Nano Patterning Using Tool-Based Methods is a scholarly work, published in 2016 in ''International Islamic University Malaysia Engineering Journal''. The main subjects of the publication include materials science, nano, nanotechnology, miniaturization, nanolithography, chemical-mechanical planarization, lithography, process, electrical discharge machining, mechanical engineering, machining, computer science, and engineering. In this paper, an attempt has beenmade to present the recent innovations in tool-based micro/nano patterning processes..