Improved Pattern Transfer in Soft Lithography Using Composite Stamps
Improved Pattern Transfer in Soft Lithography Using Composite Stamps is a scholarly work by Teri W. Odom and George M. Whitesides, published in 2002 in ''Langmuir''. The main subjects of the publication include materials science, condensed matter physics, layer, nanolithography, atomic force microscopy, optoelectronics, Soft lithography, composite number, moulding, transfer printing, composite material, nanotechnology, Micro contact printing, PDMS stamp, electron beam lithography, photolithography, and lithography. The paper demonstrates how pattern transfer using other soft lithographic techniquesmicromolding in capillaries, microtransfer molding, and phase-shifting lithographycan be improved using two-layer stamps relative to stamps made of Sylgard 184 poly(dimethylsiloxane).