Design and simulation of a novel MEMS-based single proof mass three-axis piezo-capacitive accelerometer
Design and simulation of a novel MEMS-based single proof mass three-axis piezo-capacitive accelerometer is a scholarly work, published in 2024 in ''Microsystem Technologies''. The main subjects of the publication include fiber-optic sensor, acoustics, proof of concept, electronic engineering, micro-electromechanical systems, Proof mass, accelerometer, capacitive sensing, computer science, and electrical engineering. The work presents a novel three-axis accelerometer that uses capacitive and piezoelectric sensing mechanisms.