Defect Detection in Electronic Surfaces Using Template-Based Fourier Image Reconstruction
Defect Detection in Electronic Surfaces Using Template-Based Fourier Image Reconstruction is a scholarly work, published in 2019 in ''IEEE transactions on components, packaging, and manufacturing technology''. The main subjects of the publication include image, electron beam lithography, invariant, pixel, artificial intelligence, failure analysis, computer vision, Template matching, pattern recognition, Fourier transform, and computer science. The authors propose a global Fourier image reconstruction method to detect and localize small defects in nonperiodical pattern images.