Tolerance assurance of interferometer for optical HCB process
Tolerance assurance of interferometer for optical HCB process is a scholarly work, published in 2018 in ''Guangxue Jingmi Gongcheng/Optics and Precision Engineering''. The main subjects of the publication include optical interconnect, chemical-mechanical planarization, interferometry, remote sensing, environmental science, process, dimensional metrology, and computer science.