The study of a high-isolation single-pole-double-throw RF MEMS switch
The study of a high-isolation single-pole-double-throw RF MEMS switch is a scholarly work, published in 2018 in ''Modern Physics Letters B''. The main subjects of the publication include Insertion loss, optoelectronics, radio frequency, actuator, silicon photonics, Optomechanics, return loss, micro-electromechanical systems, fabrication of data, materials science, RF switch, and electrical engineering. In this paper, design, fabrication and measurements of a novel single-pole-double-throw three-state RF MEMS switch based on silicon substrate are presented.