Microfabrication of integrated scanning tunneling microscope
Microfabrication of integrated scanning tunneling microscope is a scholarly work, published in 1990 in ''Journal of Vacuum Science & Technology A''. The main subjects of the publication include optics, Bimorph, semiconductor wafer, optoelectronics, nanotechnology, scanning tunneling microscope, scanning probe microscopy, actuator, microfabrication, cantilever, Optomechanics, piezoelectricity, atomic force microscopy, Electrochemical scanning tunneling microscope, materials science, and microscope. An integrated circuit-compatible process has been demonstrated for microfabricating arrays of scanning tunneling microscopes on silicon wafers.