Magnetron sputtering system equipped with a versatile substrate table
Magnetron sputtering system equipped with a versatile substrate table is a scholarly work, published in 1983 in ''Journal of Vacuum Science & Technology A''. The main subjects of the publication include deposition, sputtering, optoelectronics, database table, density functional theory, feature, aquarium substrate, sputter deposition, cavity magnetron, materials science, and thin film. A three target dc magnetron sputtering system has been constructed.