The village was first mentioned in the 1st century as Carvio ad Molem. The etymologie in unclear. It was discovered on the tomb of Marcus Mallius, a Roman soldier buried in Herwen. In 897, it was attested as Harauua. Herwen developed along the Oude Rijn near Castle Ter Cluse. The castle was built in 1348 and destroyed in 1598. In 1652, a havezate was built in its place. The Catholic St.-Martinus Church was built between 1904 and 1905 as a replacement of an 1818 predecessor. In 1840, Herwen was home to 654people.