Digital phase-locked data processing for ellipsometric parameter measurements based on photoelastic modulation
Digital phase-locked data processing for ellipsometric parameter measurements based on photoelastic modulation is a scholarly work, published in 2018 in ''Guangxue Jingmi Gongcheng/Optics and Precision Engineering''. The main subjects of the publication include modulation, optics, radiometry, ellipsometry, polarimetry, dimensional metrology, phase modulation, materials science, phase, and computer science.