Automated system for measuring electrophysical parameters of semiconductor structures
Automated system for measuring electrophysical parameters of semiconductor structures is a scholarly work, published in 2023 in ''Izmeritel`naya Tekhnika''. The main subjects of the publication include quantization, computer science, reforestation, electronic engineering, cyber-physical system, measurement error, IEEE 1451, metrology, electrolytic conductivity, component, and algorithm. In particular, based on the metrological analysis performed, it was found that the limits of the permissible relative error of capacitance and conductivity measurements do not exceed ±3 %, which is confi rmed experimentally.