Analysis of pulse-time modulated high-density discharges
Analysis of pulse-time modulated high-density discharges is a scholarly work, published in 1996 in ''Journal of Vacuum Science & Technology A''. The main subjects of the publication include power density, plasma, pulse duration, atomic physics, thin film, modulation, power, pulse, environmental science, range, chemistry, duty cycle, atomic layer deposition, chlorine, energy density, materials science, Selectivity (electronic), Analytical Chemistry, and mechanics. Results are presented for chlorine and CF4 discharges for a range of pulse periods and duty ratios..