List of MEMS foundries
The list below provides an overview of companies that develop and fabricate MEMS devices. These companies are usually referred to the concept of foundries. The offer of the companies varies according to the used material, the production volume and the size of the wafers used for the fabrication. The attribute type is for Integrated Device Manufacturer, Pure-play or Research Institute business model.
| Company | Service | Substrate materials | Production volume | Wafer diameters | Type | Headquartered country | - |
| Asia Pacific Microsystems, Inc. | MEMS Foundry | Silicon, Sapphire, SOI, Glass, Quartz, Polymer, CMOS-wafers | High volume production | 6 | Pure-play | - | |
| MEMS, biochip, sensor and photonics manufacturing, including custom design, development, prototyping, and high-volume production | Silicon, SOI, borosilicate, fused silica, quartz, glass, piezo, and engineered substrates | High-volume production | 6, 8 | Pure-play | - | ||
| Customized MEMS: process, manufacturing, packaging, characterization, failure analysis and reliability. | Silicon, SOI, glass, and CMOS-wafers. | R&D, prototyping and pilot line. | 8 | Research Institute | - | ||
| CEA-Leti | Customized MEMS, NEMS, BioMEMS: design, process, manufacturing, characterization, and packaging | Silicon, SOI, glass, and CMOS-wafers. | R&D recurrent batches and pilot line. | 8, 12 | Research Institute | - | |
| CSEM | MEMS design & process development, Lab-to-Fab approach. Focus areas include photonics, microfluidics, watch components, and harsh environments. Lithium niobate and silicon carbide processing are notable technology bricks. | Silicon, SOI, lithium niobate, silicon carbide, fused silica, quartz, glass. | Prototyping, small & medium volume production | 6 | Research Institute | - | |
| Fraunhofer Institute for Silicon Technology | MEMS design & process development, main Fraunhofer site for post-CMOS, MEMS, electroplating, CMP | Silicon, SOI, glass, GaN and CMOS. | Proof-of-concept, prototyping, small volume production | 8 | Research Institute | - | |
| Fraunhofer Institute for Microelectronic Circuits and Systems | MEMS design & process development, Fraunhofer focus location for specialized MEMS-processes | Silicon, SOI. | Proof-of-concept, Prototyping, small volume production | 8 | Research Institute | - | |
| Hanking Electronics | Class 100 MEMS Foundry Services, MEMS IMUs, IoT modules and MEMS Design Services. Foundry processes include; Film Deposition, Metal Deposition, Thermal, Wafer Bonding, Etch processes including DRIE and VHF, Wet Processes, and Wafer Level Packaging. | Silicon | High volume production | 8 | IDM |  China |